2500c high temperature induction heating vacuum CVD furnace

The equipment is batch type induction furnace, mainly used for CVD in carbon carbon material and carbon composite material or graphite parts material.

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Introduction

1.Application:

The equipment is batch type induction furnace, mainly used for CVD in carbon carbon material and carbon composite material or graphite parts material.

2.Configuration:

380V±5%，50Hz/60Hz 3 phase 5 wire

One control cabinet to one furnace, the facility equipped of mixed gas control system, cooling tower for optional.

Model Parameter		Lab usage	Production usage
Model Parameter		NTI-CJL-42L	NTI-CJL-100L	NTI-CJL-196L	NTI-CJL-339L	NTI-CJL-803L
Working size	mm	300×600	400x800	500×1000	600x1200	800x1600
Heating type	/	IF induction heating
Crucible	/	Graphite
Control type	/	Thyristor control or IGBT control ( optional )
HT zone capacity	L	42	100	196	339	803
Loading weight	g	HT zone capacity × density (g/cm3)×1000 Remark：1L=1000cm3
Ultimate vacuum	Pa	50
IF power	Kw	100	150	200	250	350
Max. working temperature	℃	2500	2500	2500	2500	2500
Vapor deposition temperature	℃	Within 2000℃	Within 2000℃	Within 2000℃	Within 2000℃	Within 2000℃
Temperature uniformity	℃	±5	±5	±10	±10	±10
Overall dimension	mm	5000x6000	5500x6500	6000x7000	6500x7500	7000x8000
Weight	Kg
Working environment	/	Vacuum, Argon, Nitrogen, Hydrogen atmosphere protection
Vapor deposition environment	/	300-3000pa air pressure, charging into CH?CH?CH?, CH4, C3H6.